流量传感器
AWM40000 系列
补偿式或非补偿式。±25.0 SCCM、1.0 SLPM、6.0 SLPM。模拟输出
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Overview
运营
微桥气体质量流量传感器的工作原理是热传递。气体质量流量经引导流过传感元件的表面。输出电压与流过封装进出口的空气或其他气体质量成正比。特殊设计的外壳精确地引导和控制气流流过微结构传感元件。封装的机械设计能够轻松将其安装在印刷电路板上。
微桥气体质量流量传感器内含一块独特的基于先进微结构技术的硅芯片。该芯片采用薄膜和绝热桥结构，内含加热器和温度传感元件。桥结构能够快速灵敏地响应流过芯片的空气或其他气体气流。中心加热元件两侧的双传感元件还能指示气流流过的方向和速率。激光修正的厚膜和薄膜电阻保证了从每个传感器之间始终具有一致的可互换性。
微桥气体质量流量传感器利用包裹在氮化硅薄膜中的热电阻。这些电阻呈悬浮状态，在硅片的刻蚀腔上方形成两座桥。芯片置于精确规格的气流通道，提供可重复的流量响应。通过在流量传感桥下刻蚀空腔，发热器和传感电阻能实现高效的热隔离。微桥式气体质量流量传感器的小尺寸和热隔离功能实现对气流的极速响应及高灵敏度。
惠斯通双桥控制气流测量——一个提供闭环发热器控制，另一个包含双感应元件。加热器电路通过提供与质量流量成正比的输出，最大程度地降低环境温度变化导致的输出变化。此电路可维持加热器的温度以高于环境温度 (160 °C) 恒定温差，而环境温度则由芯片上的热电阻测量得知。传感器的输出与电源电压成比例，也与惠斯通电桥电路的差分电压相对应。
注意
最大程度地降低某些应用中可能产生的灰尘污染的影响。经过设计，气流中可能存在的尘粒将平行于芯片表面流过芯片。另外，微结构芯片产生的热迁移效应能移走桥结构上的微米级尘粒。
可使用简单的过滤网，防止粉尘附着在芯片边缘和通道表面。在大多数应用中，只要在气流装置的上游侧串联一只一次性的五微米过滤网，即可获得充分的过滤效果。
注意：产品损伤
AWM 系列微桥式气体质量流量传感器不适用于测量液体流量，液体流过传感器时会损坏传感器。
不遵守这些说明可能会导致产品受损。
Data Sheet
Name
Description
File Size
Date
Size
Airflow Sensors: Amplified and Unamplified, AWM40000 Series
application/pdf 742.34 KB
2/7/2024
742.34 KB
Manuals and Guides
Name
Description
File Size
Date
Size
Airflow, Force and Pressure Sensor Product Range Guide
application/pdf 4.24 MB
7/25/2024
4.24 MB
AWM40000 Series Microbridge Mass Gas-flow Sensors
application/pdf 194.4 KB
7/15/2021
194.4 KB
CAD Model
Name
Description
File Size
Date
Size
AWM40000 Series CAD Models - grouped
application/zip 182.64 KB
7/15/2021
182.64 KB
AWM40000 Series AWM42150VH CAD Model.zip
application/zip 89.71 KB
7/15/2021
89.71 KB
AWM40000 Series AWM43300V CAD Model.zip
application/zip 92.88 KB
7/15/2021
92.88 KB
Brochure
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
application/pdf 10.1 MB
2/12/2025
10.1 MB
Technical Note
Name
Description
File Size
Date
Size
Pressure or Airflow Sensors?
application/pdf 560.47 KB
7/15/2021
560.47 KB
Energy and Environmental Design Trends
application/pdf 828.15 KB
12/20/2022
828.15 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 100.21 KB
7/15/2021
100.21 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 86.49 KB
7/15/2021
86.49 KB
Gas Media Compatibility & Correction Factors
application/pdf 146.35 KB
7/15/2021
146.35 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 192.45 KB
7/15/2021
192.45 KB
Airflow Sensor Glossary of Terms
application/pdf 156.26 KB
7/15/2021
156.26 KB
Catalog
Name
Description
File Size
Date
Size
AWM Series Airflow Sensors Introduction
application/pdf 188.31 KB
7/15/2021
188.31 KB
Application Note
Name
Description
File Size
Date
Size
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
5/18/2023
1.34 MB
Name
Description
File Size
Date
Size
Sensors and Switches for Medical Applications
application/pdf 10.1 MB
2/12/2025
10.1 MB
Airflow, Force and Pressure Sensor Product Range Guide
application/pdf 4.24 MB
7/25/2024
4.24 MB
AWM Series Airflow Sensors Introduction
application/pdf 188.31 KB
7/15/2021
188.31 KB
AWM40000 Series Microbridge Mass Gas-flow Sensors
application/pdf 194.4 KB
7/15/2021
194.4 KB
Sensors and Switches: Solutions for Medical Applications
application/pdf 1.34 MB
5/18/2023
1.34 MB
Pressure or Airflow Sensors?
application/pdf 560.47 KB
7/15/2021
560.47 KB
Airflow Sensors: Amplified and Unamplified, AWM40000 Series
application/pdf 742.34 KB
2/7/2024
742.34 KB
Energy and Environmental Design Trends
application/pdf 828.15 KB
12/20/2022
828.15 KB
Mass Airflow Sensors Particle Contamination and Filter Manufacturers
application/pdf 100.21 KB
7/15/2021
100.21 KB
AWM40000 Series CAD Models - grouped
application/zip 182.64 KB
7/15/2021
182.64 KB
Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
application/pdf 86.49 KB
7/15/2021
86.49 KB
AWM40000 Series AWM42150VH CAD Model.zip
application/zip 89.71 KB
7/15/2021
89.71 KB
Gas Media Compatibility & Correction Factors
application/pdf 146.35 KB
7/15/2021
146.35 KB
Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
application/pdf 192.45 KB
7/15/2021
192.45 KB
AWM40000 Series AWM43300V CAD Model.zip
application/zip 92.88 KB
7/15/2021
92.88 KB
Airflow Sensor Glossary of Terms
application/pdf 156.26 KB
7/15/2021
156.26 KB
Name
Date
Size
7/15/2021
7/15/2021
7/15/2021
7/15/2021
12/20/2022
7/15/2021
7/15/2021
6/12/2023
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AWM42100VH
Pressure
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM42100VH
Pressure
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM42150VH
AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM42150VH
AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM42300V
AIR FLOWNEW PRESSURE
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM42300V
AIR FLOWNEW PRESSURE
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43101VH
Pressure sensors
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43101VH
Pressure sensors
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V
Airflow Sensor
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V
Airflow Sensor
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-1
Airflow Sensor, DJY0912
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-1
Airflow Sensor, DJY0912
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-2
Airflow Sensor, DJY0913
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-2
Airflow Sensor, DJY0913
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-3
MASS AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-3
MASS AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-4
MASS AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300V-4
MASS AIRFLOW SENSOR
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300VH
FLOW
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
AWM43300VH
FLOW
https://s7d1.scene7.com/is/image/Honeywell65/sps-siot-awm40000-series-amplified
