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    Flow Sensors

    AWM40000 Series

    Compensated or uncompensated. ±25.0 SCCM, 1.0 SLPM, 6.0 SLPM. Analog output.

    Overview
    Operation

    The microbridge mass airflow sensor operates on the theory of heat transfer. Mass airflow is directed across the surface of the sensing elements. Output voltage varies in proportion to the mass air or other gas flow through the inlet and outlet ports of the package. The specially designed housing precisely directs and controls the airflow across the microstructure sensing element. Mechanical design of the package allows it to be easily mounted to printed circuit boards.

    The microbridge mass airflow sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin-film, thermally isolated bridge structure containing heater and temperature sensing elements. The bridge structure provides a sensitive and fast response to the flow of air or other gas over the chip. Dual sensing elements positioned on both sides of a central heating element indicate flow direction as well as flow rate. Laser trimmed thick film and thin film resistors provide consistent interchangeability from one device to the next.

    The microbridge mass airflow sensor uses temperature sensitive resistors deposited within a thin film of silicon nitride. They are suspended in the form of two bridges over an etched cavity in the silicon. The chip is located in a precisely dimensioned airflow channel to provide a repeatable flow response. Highly effective thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges. The small size and thermal isolation of the microbridge mass airflow sensor are responsible for the extremely fast response and high sensitivity to flows.

    Dual Wheatstone bridges control airflow measurement – one provides closed loop heater control, the other contains the dual sensing elements. The heater circuit minimizes shift due to ambient temperature changes by providing an output proportional to mass flow. The circuit keeps the heater temperature at a constant differential (160 °C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. The ratiometric voltage output of the device corresponds to the differential voltage across the Wheatstone bridge circuit.

    NOTICE

    The effects of dust contamination, which may result form some applications, can be minimized. By design, dust particles that may be present in the air stream will flow past the chip parallel to the chip surface. In addition, the microstructure chip produces a thermophoretic effect, which repels micrometer sized dust particles away from the bridge structure.

    A simple filter will prevent dust adherence to chip edges and channel surfaces. Adequate filtering in most applications can be achieved with a disposable five-micron filter used in series on the upstream side of the airflow device.

    CAUTION: PRODUCT DAMAGE

    AWM Series Microbridge Mass Airflow Sensors are not designed to sense liquid flow and will be damaged by liquid flow through the sensor.

    Failure to comply with these instructions could result in product damage.

    Data Sheet
    Name
    Description
    File Size
    Date
    Size
    Airflow Sensors: Amplified and Unamplified, AWM40000 Series
    application/pdf 742.34 KB
    2/7/2024
    742.34 KB
    Manuals and Guides
    Name
    Description
    File Size
    Date
    Size
    Airflow, Force and Pressure Sensor Product Range Guide
    application/pdf 4.24 MB
    7/25/2024
    4.24 MB
    AWM40000 Series Microbridge Mass Gas-flow Sensors
    application/pdf 194.4 KB
    7/15/2021
    194.4 KB
    CAD Model
    Name
    Description
    File Size
    Date
    Size
    AWM40000 Series AWM42150VH CAD Model.zip
    application/zip 89.71 KB
    7/15/2021
    89.71 KB
    AWM40000 Series AWM43300V CAD Model.zip
    application/zip 92.88 KB
    7/15/2021
    92.88 KB
    AWM40000 Series CAD Models - grouped
    application/zip 182.64 KB
    7/15/2021
    182.64 KB
    Brochure
    Name
    Description
    File Size
    Date
    Size
    Sensors and Switches for Medical Applications
    application/pdf 10.15 MB
    4/25/2023
    10.15 MB
    Technical Note
    Name
    Description
    File Size
    Date
    Size
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    application/pdf 192.45 KB
    7/15/2021
    192.45 KB
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    application/pdf 86.49 KB
    7/15/2021
    86.49 KB
    Energy and Environmental Design Trends
    application/pdf 828.15 KB
    12/20/2022
    828.15 KB
    Gas Media Compatibility & Correction Factors
    application/pdf 146.35 KB
    7/15/2021
    146.35 KB
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    application/pdf 100.21 KB
    7/15/2021
    100.21 KB
    Airflow Sensor Glossary of Terms
    application/pdf 156.26 KB
    7/15/2021
    156.26 KB
    Pressure or Airflow Sensors?
    application/pdf 560.47 KB
    7/15/2021
    560.47 KB
    Catalog
    Name
    Description
    File Size
    Date
    Size
    AWM Series Airflow Sensors Introduction
    application/pdf 188.31 KB
    7/15/2021
    188.31 KB
    Application Note
    Name
    Description
    File Size
    Date
    Size
    Solutions for Ventilators
    application/pdf 2.78 MB
    6/12/2023
    2.78 MB
    Sensors and Switches: Solutions for Medical Applications
    application/pdf 1.34 MB
    5/18/2023
    1.34 MB
    Name
    Description
    File Size
    Date
    Size
    Solutions for Ventilators
    application/pdf 2.78 MB
    6/12/2023
    2.78 MB
    Airflow, Force and Pressure Sensor Product Range Guide
    application/pdf 4.24 MB
    7/25/2024
    4.24 MB
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    application/pdf 192.45 KB
    7/15/2021
    192.45 KB
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    application/pdf 86.49 KB
    7/15/2021
    86.49 KB
    Energy and Environmental Design Trends
    application/pdf 828.15 KB
    12/20/2022
    828.15 KB
    Gas Media Compatibility & Correction Factors
    application/pdf 146.35 KB
    7/15/2021
    146.35 KB
    AWM40000 Series AWM42150VH CAD Model.zip
    application/zip 89.71 KB
    7/15/2021
    89.71 KB
    Sensors and Switches for Medical Applications
    application/pdf 10.15 MB
    4/25/2023
    10.15 MB
    Airflow Sensors: Amplified and Unamplified, AWM40000 Series
    application/pdf 742.34 KB
    2/7/2024
    742.34 KB
    AWM40000 Series AWM43300V CAD Model.zip
    application/zip 92.88 KB
    7/15/2021
    92.88 KB
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    application/pdf 100.21 KB
    7/15/2021
    100.21 KB
    Airflow Sensor Glossary of Terms
    application/pdf 156.26 KB
    7/15/2021
    156.26 KB
    AWM Series Airflow Sensors Introduction
    application/pdf 188.31 KB
    7/15/2021
    188.31 KB
    AWM40000 Series Microbridge Mass Gas-flow Sensors
    application/pdf 194.4 KB
    7/15/2021
    194.4 KB
    Sensors and Switches: Solutions for Medical Applications
    application/pdf 1.34 MB
    5/18/2023
    1.34 MB
    Pressure or Airflow Sensors?
    application/pdf 560.47 KB
    7/15/2021
    560.47 KB
    AWM40000 Series CAD Models - grouped
    application/zip 182.64 KB
    7/15/2021
    182.64 KB
    Name
    Description
    File Size
    Date
    Size
    Airflow Sensors: Amplified and Unamplified, AWM40000 Series
    742.34 KB
    2/7/2024
    Airflow, Force and Pressure Sensor Product Range Guide
    4.24 MB
    7/25/2024
    AWM40000 Series Microbridge Mass Gas-flow Sensors
    194.4 KB
    7/15/2021
    AWM40000 Series AWM42150VH CAD Model.zip
    89.71 KB
    7/15/2021
    AWM40000 Series AWM43300V CAD Model.zip
    92.88 KB
    7/15/2021
    AWM40000 Series CAD Models - grouped
    182.64 KB
    7/15/2021
    Sensors and Switches for Medical Applications
    10.15 MB
    4/25/2023
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    192.45 KB
    7/15/2021
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    86.49 KB
    7/15/2021
    Energy and Environmental Design Trends
    828.15 KB
    12/20/2022
    Gas Media Compatibility & Correction Factors
    146.35 KB
    7/15/2021
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    100.21 KB
    7/15/2021
    Airflow Sensor Glossary of Terms
    156.26 KB
    7/15/2021
    Pressure or Airflow Sensors?
    560.47 KB
    7/15/2021
    AWM Series Airflow Sensors Introduction
    188.31 KB
    7/15/2021
    Solutions for Ventilators
    2.78 MB
    6/12/2023
    Sensors and Switches: Solutions for Medical Applications
    1.34 MB
    5/18/2023
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