Industrial Automation
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13V: SEMI F20 Compatible
Honeywell 13V Series stainless steel pressure sensors are designed for Ultra High Purity (UHP) applications that involve measurement of gases and liquid flow in harsh environments.
SEMI F20 Compatible
SEMI F20 for ultra-high purity applications
Long Life
10 million pressure cycles minimum
316L stainless steel
Rugged, isolated stainless steel package
The 13V sensor is suitable for semiconductor manufacturing processes along with corrosion resistant (halogenated gas environments).
Wetted Component
Weld-ring and diaphragm as per SEMI-F20 UHP standard
Vibration
10 G at 20 Hz to 2000 Hz as per IEC 60068-2-6
Shock
50 G as per IEC 60068-2-27
Insulation Resistance
100 mOhm at 50 Vdc
500 psia
Lower pressure ranges (<100 psi) available
Industrial Apps
Minimum offset drift under vaccum
Explore our applications notes to learn how the 13V SEMI F20 sensor may be incorporated into UHP applications.
FLYER
SEMI F20 Products
SEMI F20 compliant sensors can simplify regulatory compliance since they are designed to meet recognized industry standards.
APPLICATION NOTE
SEMI F20 HP/UHP Applications
Find out how the 13V Series pressure sensor helps ensure process integrity and enhances product yield.
