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    Flow Sensors

    HAF Series - Low Flow

    Compensated. 10 SLPM to 300 SLPM. Digital output.

    Overview

    Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors provide a fast response to air or gas flow.

    Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

    The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.

    These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.

    Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

    Data Sheet
    Name
    Description
    File Size
    Date
    Size
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 1.23 MB
    6/16/2022
    1.23 MB
    Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 1.18 MB
    6/16/2022
    1.18 MB
    Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
    application/pdf 1.7 MB
    1/3/2022
    1.7 MB
    Manuals and Guides
    Name
    Description
    File Size
    Date
    Size
    Airflow, Force and Pressure Sensor Product Range Guide
    application/pdf 4.24 MB
    7/25/2024
    4.24 MB
    Installation Instructions
    Name
    Description
    File Size
    Date
    Size
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 524.05 KB
    6/27/2022
    524.05 KB
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
    application/pdf 524.05 KB
    7/15/2021
    524.05 KB
    Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/pdf 526.3 KB
    7/15/2021
    526.3 KB
    CAD Model
    Name
    Description
    File Size
    Date
    Size
    Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
    application/zip 1.77 MB
    7/27/2022
    1.77 MB
    Brochure
    Name
    Description
    File Size
    Date
    Size
    Controlling the Future with Technology
    application/pdf 11.8 MB
    3/7/2023
    11.8 MB
    Sensors and Switches for Medical Applications
    application/pdf 10.15 MB
    4/25/2023
    10.15 MB
    Embedded Products in Hospital Applications
    application/pdf 4.7 MB
    6/12/2023
    4.7 MB
    Technical Note
    Name
    Description
    File Size
    Date
    Size
    Energy and Environmental Design Trends
    application/pdf 828.15 KB
    12/20/2022
    828.15 KB
    Pressure or Airflow Sensors?
    application/pdf 560.47 KB
    7/15/2021
    560.47 KB
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    application/pdf 192.45 KB
    7/15/2021
    192.45 KB
    I2C Communications with Honeywell Digital Airflow Sensors Technical Note
    application/pdf 237.91 KB
    7/15/2021
    237.91 KB
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    application/pdf 86.49 KB
    7/15/2021
    86.49 KB
    Airflow Sensor Glossary of Terms
    application/pdf 156.26 KB
    7/15/2021
    156.26 KB
    Gas Media Compatibility & Correction Factors
    application/pdf 146.35 KB
    7/15/2021
    146.35 KB
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    application/pdf 100.21 KB
    7/15/2021
    100.21 KB
    Industrial Product Line Card --
    application/pdf 2.24 MB
    10/25/2022
    2.24 MB
    Catalog
    Name
    Description
    File Size
    Date
    Size
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    application/pdf 82.4 KB
    7/15/2021
    82.4 KB
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/postscript 319.61 KB
    7/15/2021
    319.61 KB
    Application Note
    Name
    Description
    File Size
    Date
    Size
    Solutions For Healthier Air & HVAC Systems
    application/pdf 3.88 MB
    5/31/2022
    3.88 MB
    Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    application/pdf 488.55 KB
    7/15/2021
    488.55 KB
    Sensors in Anesthesia Machines
    application/pdf 2.3 MB
    7/15/2021
    2.3 MB
    Solutions for Ventilators
    application/pdf 2.78 MB
    6/12/2023
    2.78 MB
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/pdf 282.8 KB
    7/15/2021
    282.8 KB
    Solutions for Laboratory Automation
    application/pdf 6.42 MB
    6/12/2023
    6.42 MB
    Sensors and Switches for HVAC Applications
    application/pdf 4.51 MB
    7/15/2021
    4.51 MB
    Sensors in Sleep Apnea Machines
    application/pdf 1.88 MB
    7/15/2021
    1.88 MB
    Sensors and Switches: Solutions for Medical Applications
    application/pdf 1.34 MB
    5/18/2023
    1.34 MB
    Product Photo
    Name
    Description
    File Size
    Date
    Size
    HAF Series - Low Flow Product Photo - grouped
    application/zip 328.44 KB
    7/15/2021
    328.44 KB
    Name
    Description
    File Size
    Date
    Size
    Energy and Environmental Design Trends
    application/pdf 828.15 KB
    12/20/2022
    828.15 KB
    Airflow, Force and Pressure Sensor Product Range Guide
    application/pdf 4.24 MB
    7/25/2024
    4.24 MB
    Controlling the Future with Technology
    application/pdf 11.8 MB
    3/7/2023
    11.8 MB
    Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
    application/zip 1.77 MB
    7/27/2022
    1.77 MB
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 524.05 KB
    6/27/2022
    524.05 KB
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 1.23 MB
    6/16/2022
    1.23 MB
    Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    application/pdf 1.18 MB
    6/16/2022
    1.18 MB
    Solutions For Healthier Air & HVAC Systems
    application/pdf 3.88 MB
    5/31/2022
    3.88 MB
    Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    application/pdf 488.55 KB
    7/15/2021
    488.55 KB
    Pressure or Airflow Sensors?
    application/pdf 560.47 KB
    7/15/2021
    560.47 KB
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    application/pdf 192.45 KB
    7/15/2021
    192.45 KB
    Sensors in Anesthesia Machines
    application/pdf 2.3 MB
    7/15/2021
    2.3 MB
    Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
    application/pdf 1.7 MB
    1/3/2022
    1.7 MB
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    application/pdf 82.4 KB
    7/15/2021
    82.4 KB
    Solutions for Ventilators
    application/pdf 2.78 MB
    6/12/2023
    2.78 MB
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/pdf 282.8 KB
    7/15/2021
    282.8 KB
    Solutions for Laboratory Automation
    application/pdf 6.42 MB
    6/12/2023
    6.42 MB
    I2C Communications with Honeywell Digital Airflow Sensors Technical Note
    application/pdf 237.91 KB
    7/15/2021
    237.91 KB
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
    application/pdf 524.05 KB
    7/15/2021
    524.05 KB
    Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/pdf 526.3 KB
    7/15/2021
    526.3 KB
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    application/pdf 86.49 KB
    7/15/2021
    86.49 KB
    Sensors and Switches for HVAC Applications
    application/pdf 4.51 MB
    7/15/2021
    4.51 MB
    Sensors and Switches for Medical Applications
    application/pdf 10.15 MB
    4/25/2023
    10.15 MB
    HAF Series - Low Flow Product Photo - grouped
    application/zip 328.44 KB
    7/15/2021
    328.44 KB
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    application/postscript 319.61 KB
    7/15/2021
    319.61 KB
    Airflow Sensor Glossary of Terms
    application/pdf 156.26 KB
    7/15/2021
    156.26 KB
    Embedded Products in Hospital Applications
    application/pdf 4.7 MB
    6/12/2023
    4.7 MB
    Gas Media Compatibility & Correction Factors
    application/pdf 146.35 KB
    7/15/2021
    146.35 KB
    Sensors in Sleep Apnea Machines
    application/pdf 1.88 MB
    7/15/2021
    1.88 MB
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    application/pdf 100.21 KB
    7/15/2021
    100.21 KB
    Industrial Product Line Card --
    application/pdf 2.24 MB
    10/25/2022
    2.24 MB
    Sensors and Switches: Solutions for Medical Applications
    application/pdf 1.34 MB
    5/18/2023
    1.34 MB
    Name
    Description
    File Size
    Date
    Size
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    1.23 MB
    6/16/2022
    Honeywell Zephyr™ Analog Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    1.18 MB
    6/16/2022
    Honeywell ZephyrTM Digital Airflow SensorsHAF Series—High Accuracy: 10 SLPM, 15 SLPM, 20 SLPM,50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
    1.7 MB
    1/3/2022
    Airflow, Force and Pressure Sensor Product Range Guide
    4.24 MB
    7/25/2024
    Honeywell Zephyr™ Digital Airflow Sensors HAF Series—High Accuracy: ±50 SCCM to ±750 SCCM
    524.05 KB
    6/27/2022
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, ±50 SCCM to ±750 SCCM Installation Instructions
    524.05 KB
    7/15/2021
    Honeywell Zephyrâ„¢ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    526.3 KB
    7/15/2021
    Honeywell Zephyr™ HAF Series - High Accuracy: ±50 SCCM to ±750 SCCM CAD Models
    1.77 MB
    7/27/2022
    Controlling the Future with Technology
    11.8 MB
    3/7/2023
    Sensors and Switches for Medical Applications
    10.15 MB
    4/25/2023
    Embedded Products in Hospital Applications
    4.7 MB
    6/12/2023
    Energy and Environmental Design Trends
    828.15 KB
    12/20/2022
    Pressure or Airflow Sensors?
    560.47 KB
    7/15/2021
    Mass Flow Sensors: Mass Flow versus Volumetric Flow and Flow Rate Unit Conversions
    192.45 KB
    7/15/2021
    I2C Communications with Honeywell Digital Airflow Sensors Technical Note
    237.91 KB
    7/15/2021
    Mass Airflow Sensors Measuring Low Differential Pressures Altitude and Gas Density Correction
    86.49 KB
    7/15/2021
    Airflow Sensor Glossary of Terms
    156.26 KB
    7/15/2021
    Gas Media Compatibility & Correction Factors
    146.35 KB
    7/15/2021
    Mass Airflow Sensors Particle Contamination and Filter Manufacturers
    100.21 KB
    7/15/2021
    Industrial Product Line Card --
    2.24 MB
    10/25/2022
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    82.4 KB
    7/15/2021
    Honeywell Zephyr™ Airflow Sensors, HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    319.61 KB
    7/15/2021
    Solutions For Healthier Air & HVAC Systems
    3.88 MB
    5/31/2022
    Honeywell Zephyr™ Analog and Digital Airflow Sensors: HAF Series-High Accuracy, �50 SCCM to �750 SCCM
    488.55 KB
    7/15/2021
    Sensors in Anesthesia Machines
    2.3 MB
    7/15/2021
    Solutions for Ventilators
    2.78 MB
    6/12/2023
    Honeywell Zephyr™ Digital Airflow Sensors: HAF Series-High Accuracy, 10 SLPM to 300 SLPM
    282.8 KB
    7/15/2021
    Solutions for Laboratory Automation
    6.42 MB
    6/12/2023
    Sensors and Switches for HVAC Applications
    4.51 MB
    7/15/2021
    Sensors in Sleep Apnea Machines
    1.88 MB
    7/15/2021
    Sensors and Switches: Solutions for Medical Applications
    1.34 MB
    5/18/2023
    HAF Series - Low Flow Product Photo - grouped
    328.44 KB
    7/15/2021
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